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Structure and intrinsic stress of nickel silicide films

✍ Scribed by Koos, V. ;Beck, U. ;Neumann, H.-G.


Publisher
John Wiley and Sons
Year
1976
Tongue
English
Weight
359 KB
Volume
37
Category
Article
ISSN
0031-8965

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Stresses in thin nickel silicide films
✍ Koos, V. ;Neumann, H.-G. πŸ“‚ Article πŸ“… 1975 πŸ› John Wiley and Sons 🌐 English βš– 96 KB