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Structure and electrical properties of PZT thick films produced by plasma spraying

โœ Scribed by W. Haessler; R. Thielsch; N. Mattern

Book ID
119125541
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
598 KB
Volume
24
Category
Article
ISSN
0167-577X

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๐Ÿ“œ SIMILAR VOLUMES

Microstructures and dielectric propertie
Microstructures and dielectric properties of PZT thick films prepared by aerosol plasma deposition with microwave annealing
โœ C.M. Huang; S.F. Wang; C.J. Peng; J. Shieh; C.S. Chang; T.S. Lin ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 522 KB

Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan ฮด) of the as-deposited film measured at 100 kHz are 223 and 0.034, res