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Microstructures and Dielectric Properties of PZT Coatings Prepared by Supersonic Plasma Spraying

✍ Scribed by Li, Guolu; Gu, Linsong; Wang, Haidou; Xing, Zhiguo; Zhu, Lina

Book ID
121554986
Publisher
Springer US
Year
2013
Tongue
English
Weight
505 KB
Volume
23
Category
Article
ISSN
1059-9630

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Microstructures and dielectric propertie
Microstructures and dielectric properties of PZT thick films prepared by aerosol plasma deposition with microwave annealing
✍ C.M. Huang; S.F. Wang; C.J. Peng; J. Shieh; C.S. Chang; T.S. Lin πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 522 KB

Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan Ξ΄) of the as-deposited film measured at 100 kHz are 223 and 0.034, res