𝔖 Bobbio Scriptorium

✦ LIBER ✦

Structure and electrical conductivity of polycrystalline silicon films grown by molecularbeam deposition accompanied by low-energy ion bombardment of the growth surface

✍ Scribed by D. A. Pavlov; A. F. Khokhlov; D. V. Shungurov; V. G. Shengurov

Book ID: 110119683
Publisher: Springer
Year: 1997
Tongue: English
Weight: 290 KB
Volume: 31
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1187274

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Erratum: Structure and electrical conduc

Erratum: Structure and electrical conductivity of polycrystalline silicon films grown by molecular-beam deposition accompanied by low-energy ion bombardment of the growth surface [Semiconductors 31, 237–240 (March 1997)]

✍ D. A. Pavlov; A. F. Khokhlov; D. V. Shungurov; V. G. Shengurov 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 19 KB

Control of ion bombardment energy in the

Control of ion bombardment energy in the low-temperature deposition of highly transparent and conducting In2O3 and ZnO thin films by activated reactive evaporation: W S Lau, J Vac Sci Technol, A6, 1988, 2015–2019

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 143 KB

Oxygen interaction of CdS-based gas sens

Oxygen interaction of CdS-based gas sensors with different stoichiometric compositions was studied by X-ray photoelectron spectroscopy (XPS) and thermal-desorption mass spectroscopy observations combined with conductivity measurements. Three different types of film with different atomic ratios of Cd/S were used in the study of oxygen chemisorption in a low-temperature range between 300 and 570 K. Spray pyrolysis was used for the deposition of the films on glass substrates; XPS and energy dispersive spectroscopy of X-ray together with atomic force microscopy and scanning electron microscopy were used for the characterization of the composition and structure of the films. It was possible to distinguish different temperature ranges for the thermal desorption of the different adsorbed oxygen species. A comparison of the data from XPS and mass-spectroscopy observations with conductance measurements allows to conclude that metallic surface atoms are responsible for different interactions of oxygen species with CdS surfaces.

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 379 KB