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Structure and composition studies for silicon nitride thin films deposited by single ion bean sputter deposition

✍ Scribed by Lin Huang; K.W Hipps; J.T Dickinson; Ursula Mazur; X.D Wang

Book ID
108389042
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
241 KB
Volume
299
Category
Article
ISSN
0040-6090

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Silicon nitride (SiN x ) films were prepared by ion-assisted deposition process. The films were analyzed by measurement of scanning electron microscopy (SEM), Fourier transform infrared spectrometry (FTIR), Xray photoelectron spectrometry, spectrophotometer, and ellipsometer measurements. The effect