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Structural Variation of the BaTi4O9 Thin Films Grown by RF Magnetron Sputtering

✍ Scribed by Bo-Yun Jang; Young-Hun Jeong; Suk-Jin Lee; Kyong-Jae Lee; Sahn Nahm; Ho-Jung Sun; Hwack-Joo Lee


Book ID
109256239
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
759 KB
Volume
88
Category
Article
ISSN
0002-7820

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✍ J.E. Alfonso; J. Buitrago; J. Torres; B. Santos; J.F. Marco πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 177 KB

In this work we report on the results obtained on NbN x thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films h