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Structural transitions in hard Si-based TiN coatings: the effect of bias voltage and temperature

✍ Scribed by F Vaz; L Rebouta; Ph Goudeau; T Girardeau; J Pacaud; J.P Riviére; A Traverse

Book ID: 108422947
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 616 KB
Volume: 146-147
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(01)01395-0

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