✦ LIBER ✦
Effect of the substrate bias potential on crystalline grain size, intrinsic stress and hardness of vacuum arc evaporated TiN/c-Si coatings
✍ Scribed by F.J Espinoza-Beltrán; O Che-Soberanis; L Garcı́a-González; J Morales-Hernández
- Book ID
- 111714475
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 148 KB
- Volume
- 437
- Category
- Article
- ISSN
- 0040-6090
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