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Structural study of TiO2 thin films by micro-Raman spectroscopy

✍ Scribed by Niilisk, Ahti ;Moppel, Mart ;Pärs, Martti ;Sildos, Ilmo ;Jantson, Taavi ;Avarmaa, Tea ;Jaaniso, Raivo ;Aarik, Jaan

Book ID
107385652
Publisher
Walter de Gruyter GmbH
Year
2006
Tongue
English
Weight
269 KB
Volume
4
Category
Article
ISSN
2391-5471

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Structural study of TiO2 thin films by micro-Raman spectroscopy
✍ Niilisk, Ahti ;Moppel, Mart ;Pärs, Martti ;Sildos, Ilmo ;Jantson, Taavi ;Avarmaa 📂 Article 📅 2006 🏛 Walter de Gruyter GmbH 🌐 English ⚖ 269 KB

The Raman spectroscopy method was used for structural characterization of TiO 2 thin films prepared by atomic layer deposition (ALD) and pulsed laser deposition (PLD) on fused silica and single-crystal silicon and sapphire substrates. Using ALD, anatase thin films were grown on silica and silicon su