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Structural characterization of thin films formed or changed on materials by micro Raman spectroscopy

✍ Scribed by K. Witke; Klaus-Werner Brzezinka; Peter Reich


Publisher
Springer
Year
1998
Tongue
English
Weight
75 KB
Volume
361
Category
Article
ISSN
1618-2650

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## Abstract Comparative structural analyses of a crystallized, 60 nm thick silicon film deposited on quartz substrate were performed using high resolution transmission electron microscopy (HRTEM) and Raman spectroscopy (RS). Both methods suggest high degree of crystallization of the film. The mater