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Structural studies of ultrathin silicon oxides and their interfaces by XPS

✍ Scribed by Takeo Hattori; Hiroaki Yamagishi; Noboru Koike; Keitaro Imai; Kikuo Yamabe

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 359 KB
Volume: 41-42
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90094-9

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