✦ LIBER ✦
PECVD silicon oxides as studied by XPS, RBS, ERDA, IRS and ESR
✍ Scribed by A. Ermolieff; T. Sindzingre; S. Marthon; P. Martin; F. Pierre; L. Peccoud
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 687 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0169-4332
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