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Structural properties of a-SiC:H- and a-SiN:H-Alloys from XPS-analyses and IR-absorption

✍ Scribed by G.H. Bauer; H.-D. Mohring; G. Bilger; A. Eicke


Book ID
118333519
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
151 KB
Volume
77-78
Category
Article
ISSN
0022-3093

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