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Structural properties and electrical behaviour of thin silicon oxynitride layers

✍ Scribed by R Beyer; H Burghardt; R Reich; E Thomas; T Gessner; D.R.T Zahn


Book ID
108362251
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
220 KB
Volume
38
Category
Article
ISSN
0026-2714

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