✦ LIBER ✦

A Study of the Compositional Structure and Electrical Behaviour of Thin Silicon Oxynitride Layers Prepared by Rapid Thermal Processing

✍ Scribed by Beyer, R. ;Burghardt, H. ;Prösch, G. ;Thomas, E. ;Reich, R. ;Grambole, D. ;Herrmann, F. ;Weidner, G. ;Syhre, H. ;Dittmar, K.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structure and Electrical Properties of L

✍ Tang, X.G. ;Ding, A.L. ;Zhang, J.X. 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 125 KB 👁 2 views

XPS study on composition and structure o

✍ C. J. Lu; A. X. Kuang; G. Y. Huang; S. M. Wang 📂 Article 📅 1996 🏛 Springer 🌐 English ⚖ 472 KB

A comparative study on the electrical an

✍ Matej Mičušík; Mária Omastová; Igor Krupa; Jan Prokeš; Polycarpos Pissis; Emmanu 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 748 KB