✦ LIBER ✦

Structural, optical and hydrophobic properties of sputter deposited zirconium oxynitride films

✍ Scribed by Sushant K. Rawal; Amit Kumar Chawla; Vipin Chawla; R. Jayaganthan; Ramesh Chandra

Book ID: 108215788
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 587 KB
Volume: 172
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2010.05.027

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thickness-dependent structural and optic

Thickness-dependent structural and optical properties of sputter deposited ZrO2 films

✍ Sha Zhao; Fei Ma; Zhongxiao Song; Kewei Xu 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 255 KB

ZrO 2 thin films in thickness of 17 nm to 559 nm were deposited on Si-(1 0 0) and glass substrates using mid-frequency reactive magnetron sputtering method. The microstructure analysis showed that the stable monoclinic phase preferentially grew in the initial growth stage, whereas the relative amoun

Hydrogenation of silicon nitride and sil

Hydrogenation of silicon nitride and silicon oxynitride films deposited by reactive sputtering: Optical properties

✍ Schalch, D. ;Scharniann, A. ;Wolffut, R. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 258 KB

Structural, electrical and optical prope

Structural, electrical and optical properties of sputter-deposited Nb-doped TiO2 (TNO) polycrystalline films

✍ Naoomi Yamada; Taro Hitosugi; Ngoc Lam Huong Hoang; Yutaka Furubayashi; Yasushi 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 452 KB

Preparation of composition-controlled si

Preparation of composition-controlled silicon oxynitride films by sputtering; deposition mechanism, and optical and surface properties

✍ T. Kanata; H. Takakura; Y. Hamakawa 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 772 KB

Structural and electrical properties of

Structural and electrical properties of ion beam sputter deposited tantalum films

✍ F. Sajovec; P.M. Meuffels; T. Schober 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Optical properties of sputter-deposited

Optical properties of sputter-deposited aluminium nitride films on silicon

✍ P.B. Legrand; M. Wautelet; B. Dugnoille; J.P. Dauchot; M. Hecq 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 451 KB