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Structural, electrical and optical properties of sputter-deposited Nb-doped TiO2 (TNO) polycrystalline films

โœ Scribed by Naoomi Yamada; Taro Hitosugi; Ngoc Lam Huong Hoang; Yutaka Furubayashi; Yasushi Hirose; Seiji Konuma; Toshihiro Shimada; Tetsuya Hasegawa

Book ID
108289935
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
452 KB
Volume
516
Category
Article
ISSN
0040-6090

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Thickness-dependent structural and optic
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ZrO 2 thin films in thickness of 17 nm to 559 nm were deposited on Si-(1 0 0) and glass substrates using mid-frequency reactive magnetron sputtering method. The microstructure analysis showed that the stable monoclinic phase preferentially grew in the initial growth stage, whereas the relative amoun