Structural nano-defects in α-silicon nitride
✍ Scribed by Chong-Min Wang; F.L. Riley
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 683 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0955-2219
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Silicon nitride ceramics have been co-implanted with boron and titanium ions at a fluence of 2 • 10 17 ions/cm 2 and an energy of 200 keV. TEM results indicated that the boron and titanium-implanted layers were amorphized separately and titanium nitride nano-crystallites were formed in the titanium-