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A study of defects in nanostructured amorphous silicon nitride

✍ Scribed by Wang, Tao ;Zhang, Lide ;Mo, Chimei ;Hu, Jitong ;Xie, Cunyi

Publisher: John Wiley and Sons
Year: 1993
Tongue: English
Weight: 302 KB
Volume: 139
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211390204

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