Structural modifications of silicon-doped carbon nitride films during post-deposition annealing

✍ Scribed by Fernández-Ramos, C.; Sánchez-López, J.C.; Rojas, T.C.; Fernández, A.

• Book ID: 123600487
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 568 KB
• Volume: 12
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(02)00328-X