Crystallinity improvement of hexagonal boron nitride films by molybdenum catalysts during microwave plasma chemical vapor deposition and post-annealing

✍ Scribed by Fei Liu; Jie Yu; Xuedong Bai

• Book ID: 116245437
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 543 KB
• Volume: 258
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.06.108