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Structural modifications in amorphous Ge produced by ion implantation

✍ Scribed by I.D. Desnica-Franković; K. Furić; U.V. Desnica; M.C. Ridgway; C.J. Glover

Book ID
114164424
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
229 KB
Volume
178
Category
Article
ISSN
0168-583X

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GISAXS studies of structural modificatio
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✍ I.D. Desnica-Franković; P. Dubcek; U.V. Desnica; S. Bernstorff; M.C. Ridgway; C. 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 940 KB

Grazing incidence small angle scattering of X-rays (GISAXS) was used to analyze structural modifications in implantation-damaged Ge. Samples were implanted by different doses of 74 Ge, from 3 • 10 12 cm À2 to 3 • 10 16 cm À2 ; at room-or liquid nitrogen-temperature, respectively. We have found that