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Etching of amorphous Al2O3 produced by ion implantation

✍ Scribed by Carl J. McHargue; John D. Hunn; Debra L. Joslin; E. Alves; M.F. da Silva; J.C. Soares


Book ID
114168966
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
297 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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