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Formation of amorphous layers in Al2O3 by ion implantation

✍ Scribed by C.W. White; G.C. Farlow; C.J. McHargue; P.S. Sklad; M.P. Angelini; B.R. Appleton

Book ID: 113277129
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 599 KB
Volume: 7-8
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(85)90415-x

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