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Structural investigations of the C49–C54 transformation in TiSi2 thin films

✍ Scribed by B Chenevier; O Chaix-Pluchery; I Matko; R Madar; F La Via

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
614 KB
Volume
55
Category
Article
ISSN
0167-9317

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Investigation of C49–C54 TiSi2 transform
Investigation of C49–C54 TiSi2 transformation kinetics
✍ G Ottaviani; R Tonini; D Giubertoni; A Sabbadini; T Marangon; G Queirolo; F La V 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 265 KB

The C49 ⇒ C54 TiSi polymorphic transformation has been investigated trying to elucidate the relative role played by 2 nucleation and growth in silicide formation. Samples having an amorphous layer and C54 seeds have been made by heat treatment of a Ti / Si bi-layer structure and subsequent suitable