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Structural, electrical and optical properties of transparent conducting SnO 2 films: effect of the oxygen flow rate

โœ Scribed by Maleki, M; Rozati, S M


Book ID
120992779
Publisher
Royal Swedish Academy of Sciences
Year
2012
Tongue
English
Weight
506 KB
Volume
86
Category
Article
ISSN
0031-8949

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P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall