𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Structural, electrical and optical properties of GZO/HfO2/GZO transparent MIM capacitors

✍ Scribed by Byung Du Ahn; Jong Hoon Kim; Hong Seong Kang; Choong Hee Lee; Sang Hoon Oh; Gun Hee Kim; Dong Hua Li; Sang Yeol Lee

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
353 KB
Volume
9
Category
Article
ISSN
1369-8001

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Investigations of thermal annealing effe
Investigations of thermal annealing effects on electrical and structural properties of SrTaO based MIM capacitor
✍ C. Baristiran Kaynak; M. Lukosius; I. Costina; B. Tillack; Ch. Wenger; G. Ruhl; 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 395 KB

The annealing effects on dielectric and electrode materials in Ti/SrTaO/TaN/TiN/Ti/Si metal-insulatormetal (MIM) capacitors were studied. The electrical and structural properties were investigated after subjecting the samples to annealing temperatures of 500 °C, 700 °C and 900 °C. The electrical res

First-principles study of structural, op
First-principles study of structural, optical and elastic properties of cubic HfO2
✍ Qijun Liu; Zhengtang Liu; Liping Feng; Bing Xu 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 288 KB

The structural, optical and elastic properties of cubic HfO 2 were studied using the plane-wave ultrasoft pseudopotential technique based on the first-principles density-functional theory (DFT). The groundstate properties such as lattice parameter and bulk modulus were calculated and these results a

Structure and optical properties of HfO2
Structure and optical properties of HfO2 thin films on silicon after rapid thermal annealing
✍ Tingting Tan; Zhengtang Liu; Hongcheng Lu; Wenting Liu; Hao Tian 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 231 KB

HfO 2 thin films have been deposited on Si substrate by radio frequency reactive magnetron sputtering. The optical and structural properties of HfO 2 thin films in relation to rapid thermal annealing (RTA) temperatures are investigated by spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and