𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

✍ Scribed by J.P Holgado; R Escobar Galindo; A van Veen; H Schut; J.Th.M de Hosson; A.R González-Elipe

Book ID
114165827
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
286 KB
Volume
194
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural modifications produced by the
Structural modifications produced by the incorporation of Ar within the lattice of Fe2O3 thin films prepared by ion beam induced chemical vapour deposition
✍ F Yubero; M Ocaña; A Caballero; A.R González-Elipe 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 257 KB

Iron oxide thin films have been prepared at room temperature by ion beam induced chemical vapour deposition. The films were grown by bombardment of a substrate with O ϩ 2 or O ϩ 2 ϩAr ϩ mixtures, while a Fe(CO) 5 volatile precursor was dosed on the surface. In both cases, the films were dense and ha

Effect of the deposition rate on ITO thi
Effect of the deposition rate on ITO thin film properties prepared by ion beam assisted deposition (IBAD) technique
✍ Meng, Li-Jian ;Teixeira, V. ;dos Santos, M. P. 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 507 KB

## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1–0.3 nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite