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Structural determination of indium oxide thin films on polyester substrates by transmission electron microscopy

✍ Scribed by J.E. Morris; C.A. Bishop; M.I. Ridge; R.P. Howson

Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
664 KB
Volume
62
Category
Article
ISSN
0040-6090

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## Abstract We have developed a technique for preparation of cross‐sectional transmission electron microscopy samples of reacted and unreacted Nb/al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and N