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Structural characterization of TiO_2 optical coatings by Raman spectroscopy

โœ Scribed by Pawlewicz, W. T. ;Exarhos, G. J. ;Conaway, W. E.


Book ID
115331420
Publisher
The Optical Society
Year
1983
Tongue
English
Weight
686 KB
Volume
22
Category
Article
ISSN
1559-128X

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Structural study of TiO2 thin films by m
โœ Niilisk, Ahti ;Moppel, Mart ;Pรคrs, Martti ;Sildos, Ilmo ;Jantson, Taavi ;Avarmaa ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Walter de Gruyter GmbH ๐ŸŒ English โš– 269 KB

The Raman spectroscopy method was used for structural characterization of TiO 2 thin films prepared by atomic layer deposition (ALD) and pulsed laser deposition (PLD) on fused silica and single-crystal silicon and sapphire substrates. Using ALD, anatase thin films were grown on silica and silicon su