✦ LIBER ✦

Structural characteristic and thermal stability of nanoporous SiO2 low-k thin films prepared by sol–gel method with catalyst HF

✍ Scribed by Z.W. He; X.Q. Liu; J. Gou; Y.Y. Wang

Book ID: 108215305
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 391 KB
Volume: 128
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2005.11.034

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electrical properties of nanoporous F do

Electrical properties of nanoporous F doped SiO2low-k thin films prepared by sol-gel method with catalyst HF

✍ Zhi-Wei He; Xue-Qin Liu; Da-Yin Xu; Yong-Ping Guo; Yin-Yue Wang 📂 Article 📅 2006 🏛 Springer 🌐 English ⚖ 331 KB

Effect of annealing on the properties of

Effect of annealing on the properties of low-k nanoporous SiO2 films prepared by sol–gel method with catalyst HF

✍ Z.W. He; X.Q. Liu; D.Y. Xu; Y.Y. Wang 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 262 KB

Using hydrofluoric acid (HF) as catalyst, nanoporous SiO 2 thin film was synthesized by sol-gel method. By scanning electron microscopy, Fourier transform infrared spectra, thermo gravimetric and differential thermal analysis, ellipsometry, capacitance-voltage and current-voltage measurements, the e

Thermal stability, structural properties

Thermal stability, structural properties and catalytic activity of Pd catalysts supported on Al2O3–CeO2–BaO mixed oxides prepared by sol–gel method

✍ L.F Liotta; G Deganello 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 147 KB