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Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

✍ Scribed by Venkataraj, S.; Kappertz, Oliver; Weis, HansjoÌrg; Drese, Robert; Jayavel, R.; Wuttig, Matthias

Book ID: 120005598
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 469 KB
Volume: 92
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1503858

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