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Structural and optical characterization of implanted and annealed semi-insulating GaAs

✍ Scribed by Yves B. Trudeau; R. Arès; G.E. Kajrys; G. Gagnon; J.L. Brebner; M. Jouanne


Book ID
113284759
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
358 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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Semi-insulating GaAs made by As implanta
✍ A. Claverie; F. Namavar; Z. Liliental-Weber; P. Dreszer; E.R. Weber 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 529 KB

We have demonstrated that it is possible to regrow amorphous layers created by high dose As implantation in GaAs by thermal annealing in order to obtain arsenic precipitates distributed in a GaAs matrix similarly to that observed in low temperature GaAs. The characteristics of the As precipitates ca