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Structural and electrical properties of electron beam gun evaporated Er[sub 2]O[sub 3] insulator thin films

✍ Scribed by Mikhelashvili, V.


Book ID
121303659
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
797 KB
Volume
95
Category
Article
ISSN
0021-8979

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## Abstract CdSe films have been deposited on glass substrates at different substrate temperatures between room temperature and 300 Β°C. The films exhibited hexagonal structure with preferential orientation in the (002) direction. The crystallinity improved and the grain size increased with temperat