Structural and Chemical Study of a‐BC, a‐CN, and a‐BCN Thin Films Prepared by Reactive RF Sputtering*

✍ Scribed by Essafti, A.; Ech‐chamikh, E.; Azizan, M.

• Book ID: 120948416
• Publisher: Taylor and Francis Group
• Year: 2008
• Tongue: English
• Weight: 211 KB
• Volume: 41
• Category: Article
• ISSN: 0038-7010
• DOI: 10.1080/00387010801938228