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Hydrogenated aluminum nitride thin films prepared by r.f. reactive sputtering. Infrared and structural properties

โœ Scribed by J.C. Loretz; B. Despax; P. Marti; A. Mazel


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
710 KB
Volume
265
Category
Article
ISSN
0040-6090

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