Quantitative analyses and crystallographic studies of ZnS: Mn thin films prepared by r.f. magnetron reactive sputtering
โ Scribed by H. Xian; P. Benalloul; C. Barthou; J. Benoit
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 663 KB
- Volume
- 248
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Grazing-incidence x-ray reflectivity has been exploited to study as-grown SiO 2 thin films deposited on Si(100) substrates by radio-frequency (r.f.) magnetron sputtering under various substrate temperatures and gas flow conditions. Results indicate that an increase of substrate temperature from room
A correlation between the film properties of nitrides, oxides etc., and their structure, is of fundamental importance โ not only for thin solid films physics but also for practical applications. The structure of the films depends on deposition methods and their parameters. The relationship between p