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Striations in a radio frequency planar inductively coupled plasma

✍ Scribed by Stittsworth, J.A.; Wendt, A.E.

Book ID: 117862740
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 807 KB
Volume: 24
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.491744

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