Modification of a Plasma-Therm Inductively Coupled Plasma Supply to Enable Radio-frequency Power Modulation

✍ Scribed by Ensman, R. E.; Carr, J. W.; Hieftje, G. M.

• Book ID: 115359780
• Publisher: Society for Applied Spectroscopy
• Year: 1983
• Tongue: English
• Weight: 491 KB
• Volume: 37
• Category: Article
• ISSN: 0003-7028
• DOI: 10.1366/0003702834634721