✦ LIBER ✦

Stress relaxation in Mo/Si multilayer structures

✍ Scribed by Kola, R. R.; Windt, D. L.; Waskiewicz, W. K.; Weir, B. E.; Hull, R.; Celler, G. K.; Volkert, C. A.

Book ID: 120988575
Publisher: American Institute of Physics
Year: 1992
Tongue: English
Weight: 745 KB
Volume: 60
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.106771

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Diffusion and structural relaxation in a

Diffusion and structural relaxation in amorphous Mo/Si multilayers

✍ W.G. Sloof; O.B. Loopstra; Th.H. de Keijser; E.J. Mittemeijer 📂 Article 📅 1986 🏛 Elsevier Science ⚖ 248 KB

Structure and stressed state of molybden

Structure and stressed state of molybdenum layers in Mo/Si multilayers

✍ V.I. Pinegyn; E.N. Zubarev; V.V. Kondratenko; V.A. Sevryukova; S.A. Yulin; T. Fe 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 516 KB

Synchrotron investigations of Si/Mo/Si…c

Synchrotron investigations of Si/Mo/Si…c-Si (100) multilayer nanoperiodic structures

✍ E. P. Domashevskaya, V. A. Terekhov, S. Yu. Turishchev… 📂 Article 📅 2013 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 358 KB

Strain relaxation in multilayer III–N st

Strain relaxation in multilayer III–N structures on Si(111) substrates

✍ Verkhovtceva, E. V.; Nikolaev, A. E.; Sakharov, A. V.; Yagovkina, M. A. 📂 Article 📅 2013 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 245 KB

Thermally induced decomposition of B4C b

Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures

✍ S. Bruijn; R.W.E. van de Kruijs; A.E. Yakshin; E. Zoethout; F. Bijkerk 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 515 KB

We investigate the influence of the Mo crystalline state (quasi-amorphous or crystalline) on the thermal stability of Mo/Si thin film multilayers with B 4 C diffusion barrier layers at either of the two interfaces. We find that multilayers containing amorphous Mo layers are more stable than those co

Long-term stability of a Mo/Si multilaye

Long-term stability of a Mo/Si multilayer structure

✍ Barbee, T. W. ;Rife, J. C. ;Hunter, W. R. ;Kowalski, M. P. ;Cruddace, R. G. ;See 📂 Article 📅 1993 🏛 The Optical Society 🌐 English ⚖ 303 KB