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Stress relaxation in AlCu thin films

✍ Scribed by C.J. Shute; J.B. Cohen

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 612 KB
Volume: 149
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(92)90377-d

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