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Stress-induced changes of thermal donor formation in heat-treated Czochralski-grown silicon

✍ Scribed by V.V. Emtsev; B.A. Andreev; V.Yu. Davydov; D.S. Poloskin; G.A. Oganesyan; D.I. Kryzhkov; V.B. Shmagin; V.V. Emtsev Jr; A. Misiuk; C.A. Londos


Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
215 KB
Volume
340-342
Category
Article
ISSN
0921-4526

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