✦ LIBER ✦

Stress evolution in copper–silver thin films during thermal-cycling

✍ Scribed by C.C. Chama; J.J. Vlassak; W.O. Soboyejo

Book ID: 113809969
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 647 KB
Volume: 532
Category: Article
ISSN: 0921-5093
DOI: 10.1016/j.msea.2011.11.005

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of tantalum and silver interla

Influence of tantalum and silver interlayers on thermal stress evolution in copper thin films on silicon substrates

✍ T.K. Schmidt; T.J. Balk; G. Dehm; E. Arzt 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 384 KB

Stress development in supported polymer

Stress development in supported polymer films during thermal cycling

✍ H. M. Tong; C.-K. Hu; C. Feger; P. S. Ho 📂 Article 📅 1986 🏛 Society for Plastic Engineers 🌐 English ⚖ 589 KB

Thermal effects during the deposition of

Thermal effects during the deposition of thin silver, gold and copper films and their influence on internal stress measurements

✍ R. Abermann; H.P. Martinz; R. Kramer 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 597 KB

Microstructural evolution in passivated

Microstructural evolution in passivated Al films on Si substrates during thermal cycling

✍ M. Legros; K.J. Hemker; A. Gouldstone; S. Suresh; R.-M. Keller-Flaig; E. Arzt 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 664 KB

Stress evolution in platinum thin films

Stress evolution in platinum thin films during low-energy ion irradiation

✍ Chan, Wai-Lun; Zhao, Kai; Vo, Nhon; Ashkenazy, Yinon; Cahill, David G.; Averback 📂 Article 📅 2008 🏛 The American Physical Society 🌐 English ⚖ 476 KB

Effect of thermal cycling on stresses in

Effect of thermal cycling on stresses in thin silicon nitride and silicon carbide films

✍ C. W. Lim; C. C. Toh; J. K. Fu; K. Lahiri 📂 Article 📅 1996 🏛 Springer 🌐 English ⚖ 314 KB