𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Stress and property control in sputtered metal films without substrate bias

✍ Scribed by D.W. Hoffman

Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
326 KB
Volume
107
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Composition, chemical bonding and mechan
Composition, chemical bonding and mechanical properties of magnetron sputtered CNx thin films at different substrate bias
✍ M. Gioti; S. Logothetidis; C. Charitidis; H. Lefakis πŸ“‚ Article πŸ“… 1999 πŸ› Elsevier Science 🌐 English βš– 116 KB

## Nitrogenated amorphous carbon films (a-CN V ) were prepared by reactive magnetron sputtering at room temperature with different substrate bias voltage (Β» ) and N concentration in the plasma. In situ spectroscopic ellipsometry (SE) data analysis was used to monitor the composition and the film t