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Strain measurement in thin pseudomorphic SiGe layers of submicron wires using Raman spectroscopy

✍ Scribed by B. Dietrich; E. Bugiel; H. Frankenfeldt; A.H. Harker; U. Jagdhold; B. Tillack; A. Wolff


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
398 KB
Volume
40
Category
Article
ISSN
0038-1101

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