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Strain and defect densities in Si/Si1-xGex heterostructures investigated by ion scattering and X-ray diffraction

✍ Scribed by B. Holländer; S. Mantl; B. Stritzker; F. Schäffler; H.-J. Herzog; E. Kasper


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
459 KB
Volume
50
Category
Article
ISSN
0169-4332

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