Stoichiometry and atomic defects in radio frequency sputtered SiO2
β Scribed by T.W. Hickmott; J.E. Baglin
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 84 KB
- Volume
- 58
- Category
- Article
- ISSN
- 0040-6090
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## Abstract Detection limits of heteroatoms and carbon were improved by eliminating the makeβup gas and sustaining a 350 kHz radio frequency plasma inside the end of a fused silica gas chromatography (GC) column (0.32 mm i.d.) for capillary GC with atomic emission detection. Due to the small intern