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STM surface modification of the Si–SiO2–polymer system

✍ Scribed by V.M. Kornilov; A.N. Lachinov

Book ID
104305926
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
877 KB
Volume
69
Category
Article
ISSN
0167-9317

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✦ Synopsis

This paper presents the results of a STM investigation of the Si-SiO and Si-SiO -polymer systems in air. Depending on 2 2 the scanning parameters, such as the applied voltage and tunneling current, a modification of the Si-SiO surface was 2 observed during the experiments. The possibility of a reversible modification was demonstrated. A thin polymer film was used to exclude the adsorption-desorption and electrochemical processes on the Si surface. Modification of the Si-SiO -2 polymer surface was observed at scanning parameters similar to those used for modification of the Si-SiO system. The 2 electronic mechanism of the surface modification based on tunneling of the charge through the oxide layer and its influence on the STM tunneling current is discussed.

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