Surface charge and stress in the Si/SiO2 system
โ Scribed by S.D. Brotherton; T.G. Read; D.R. Lamb; A.F.W. Willoughby
- Book ID
- 107856033
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 549 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0038-1101
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
This paper presents the results of a STM investigation of the Si-SiO and Si-SiO -polymer systems in air. Depending on 2 2 the scanning parameters, such as the applied voltage and tunneling current, a modification of the Si-SiO surface was 2 observed during the experiments. The possibility of a rever
Si-rich-SiO 2 layers with excess silicon of 45-50% were grown by RF magnetron co-sputtering from pure SiO 2 and Si targets and were studied by Raman scattering, HRTEM, electron-paramagnetic resonance and X-ray diffraction (XRD) methods as well as by photo-voltage technique operated at different temp