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Stiction in surface micromachining

✍ Scribed by Tas, Niels; Sonnenberg, Tonny; Jansen, Henri; Legtenberg, Rob; Elwenspoek, Miko

Book ID
121708031
Publisher
Institute of Physics
Year
1996
Tongue
English
Weight
592 KB
Volume
6
Category
Article
ISSN
0960-1317

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